Non-Contact Thickness Meter
U.S.-based sales, and delivery available. The ONO SOKKI CL-7100 series is a non-contact thickness measurement system designed for high-precision inspection of semiconductor wafers, EV battery films, metal sheets, and plastics. Using advanced displacement sensors, it delivers high accuracy, fast response, and multi-point measurement for production lines and laboratory environments. With features such as temperature compensation, Ethernet connectivity, and real-time monitoring, it enables efficient and reliable thickness measurement in demanding industrial applications.Non-contact measurement
It achieves high reproducibility without physically affecting the object being measured.
High accuracy and high response measurement performance
Supports high-precision measurement with accuracy of ±0.05 to ±0.12% FS (depending on sensors). The update cycle has been reduced from 20 ms to 10 ms. Effective for multi-point measurement and high-speed lines.
Temperature measurement/correction functions, Ethernet (option)
Environmental temperature measurement using the PT-100 temperature sensor and temperature correction are available. By acquiring temperature data simultaneously with thickness measurement, measurement errors caused by temperature variations are compensated, achieving higher-precision measurement. In addtion, remote monitoring and centralized data management are also available via Ethernet communication.
Equipped with a large color LCD touch panel to offer both visibility and intuitive operations
The intuitive menu display allows up to four measurement data items to be shown on a single screen. It also supports hard key operation, enabling use even while wearing gloves.
Compact, lightweight and low power consumption
Approximately 50% smaller and lighter than existing models. Its low-power consumption design reduces environmental impact.
Comparator function (with CL-0731 or CL-0732 option): real-time monitoring of abnormal values
| Measurement targets | Conductors/Semiconductors | Insulators |
| Items that require cleanliness, such as silicon wafers, steel plates, aluminum plates, hard disks, printed circuit boards, and other metal sheets, as well as soft materials, mirror-finished surfaces, and items that are easily scratched. | Plastics such as glass, polyethylene, and polypropylene. (Thin items made of a single material with uniform properties throughout) |
*For measurements of intermediate materials or composite materials in addition to the above-mentioned objects, please contact us.
When measuring conductors or semiconductors
Arrange two sensors and the measurement object in parallel within the measurement range, and set the sensor gap value (Gs) in the CL-7100 Series. The measurement object is installed between sensors A or B, and the gap value (Ga, Gb) between each sensor and the measurement object is measured, and the thickness (t) can be obtained.
| Measurement items | Thickness: Thickness of the measurement target (conductors/ semiconductors/insulators*) *when CL-0740 installed | ||
| Gap A：Gap between Sensor A and the measurement target (conductors/semiconductors only) | |||
| Gap B：Gap between Sensor B and the measurement target (conductors/semiconductors only) | |||
| A-B：Height difference/parallelism (A-B) (conductors/semiconductors only) | |||
| Temperature：Temperature * when CL-0741 installd | |||
| Compatible sensor/Resolution | Sensor | Resolution | |
| Standard | VE-2011/VE-5011/VE-1021 VE-5010/VE-1020 | 0.1 µm | |
| VE-1520 | 0.5 µm | ||
| VE-3020 VE-8020/VE-8021 | 1.0 µm | ||
| High resolution (when CL-0720 (option) installed) | VE-2011 | 0.02 µm | |
| VE-5010/ VE-5011 | 0.05 µm *when CL-0722 installed: 0.02µm | ||
| VE-1020/ VE-1021 | 0.1 µm | ||
| VE-1520 | 0.2 µm | ||
| VE-3020 VE-8020/VE-8021 | 0.5 µm | ||
| Measurement accuracy | Sensor | Accuracy | |
| Standard | VE-5010/VE-1020/VE-1520/VE-3020/VE-8020/ VE-2011/VE-5011/VE-1021/VE-8021 | ± 0.15 % FS | |
| High resolution (when CL-0720 (option) installed) | VE-2011 | ± 0.12 % FS | |
| VE-5010/VE-5011 | ± 0.10 % FS | ||
| VE-1020/VE-1021/VE-1520/VE-3020/VE-8020/ VE-8021 | ± 0.05 % FS | ||
| Temperature characteristics | Within ±0.5 % FS/°C Reference temperature: 23 °C | ||
| Sensor input cable | VL-1520(1.5 ｍ, both ends straight connector) / VL-1521(1.5 m, L type⇔Straight connector) | ||
| Display | 4.3 inch touch panel LCD (up to 4 items display) | ||
| Remote signal input/output | Input/output method | Input | Open collector |
| Output | 1 make contact output | ||
| Function | Input signal | START/STOP/PAUSE/CALIB | |
| Output signal | •Select from [Status] and [Error] •+5 V voltage output | ||
| Compatible connector | ER03-PB8M-T manufactured by Tajimi Electronics | ||
| Interface | RS-232C, Ethernet (option, CL-0751) | ||
| General specifications | Power supply | 100 to 240 VAC ±10 %, 50/60 Hz, Power consumption: 36 VA or less | |
| Outer dimension | 210(W) × 99(H) × 150(D) mm (excluding protrusions) | ||
| Weight | Approx. 1.6 kg | ||
| Operating temperature range | 0 ℃ to 40 ℃ | ||
| Storage temperature range | –10 ℃ to 50 ℃ | ||
| Operating humidity range | 20 % to 85 % （no condensation） | ||
| Storage humidity range | 20 % to 85 % （no condensation） | ||
| Warm-up time | At least 40 minutes | ||
| Electric shock protection class | Ⅰ(3 pin) | ||
| Overvoltage category | Ⅱ | ||
| Operating environment | • Outdoor use (laboratory/factory) | ||
| • Use at an altitude of up to 2,000 m | |||
| • Contamination level: 2 | |||
| Comforming to standards | RoHS Directive | 2011/65/EU Standard：EN IEC 63000 | |
| Low Voltage Directive | EN 61010-1 | ||
| Accessories | • AC power cable • Remote connector（made by Tajimi：ER03-PB8M） • Instruction manual | ||
| Accessories for CL-7100S | CL-0710 Sensor amplifier | Outer dimension | 81(W) mm × 48(H) mm × 35(D) mm(excluding protrusions) |
| Weight | Approx. 210 g | ||
| Dedicated cable (2.5 m) * up to 10 m (option) | |||
